JPH0328363Y2 - - Google Patents
Info
- Publication number
- JPH0328363Y2 JPH0328363Y2 JP1984183662U JP18366284U JPH0328363Y2 JP H0328363 Y2 JPH0328363 Y2 JP H0328363Y2 JP 1984183662 U JP1984183662 U JP 1984183662U JP 18366284 U JP18366284 U JP 18366284U JP H0328363 Y2 JPH0328363 Y2 JP H0328363Y2
- Authority
- JP
- Japan
- Prior art keywords
- light
- forward scattered
- central part
- scattered light
- mask substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 15
- 238000007689 inspection Methods 0.000 claims description 8
- 230000007547 defect Effects 0.000 claims description 7
- 206010040925 Skin striae Diseases 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984183662U JPH0328363Y2 (en]) | 1984-12-05 | 1984-12-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984183662U JPH0328363Y2 (en]) | 1984-12-05 | 1984-12-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6199043U JPS6199043U (en]) | 1986-06-25 |
| JPH0328363Y2 true JPH0328363Y2 (en]) | 1991-06-18 |
Family
ID=30741160
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984183662U Expired JPH0328363Y2 (en]) | 1984-12-05 | 1984-12-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0328363Y2 (en]) |
-
1984
- 1984-12-05 JP JP1984183662U patent/JPH0328363Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6199043U (en]) | 1986-06-25 |
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